Work

Overview of Silicon Carbide Wafer Defect Types and Inspection Techniques

Year: 2024

Type: conference-paper

DOI: 10.1109/sslchinaifws64644.2024.10835376

Authors: Yang-Chao Liu, Wen-Jie Chen, Xin Qi, Yi Shen, Lin Gu, Hong-Ping Ma

Institution: Fudan University

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Award: G2769300870

OpenAlex ID: W4406460336

FWCI: 3.021

Cites: 18

Cited by: 4

Related to: 10