Work

Optimizing Al Ion Implantation in Silicon Carbide Superjunction Devices: A Molecular Dynamics Approach

Year: 2024

Type: conference-paper

DOI: 10.1109/sslchinaifws64644.2024.10835309

Authors: Junran Zhang, Hanwen Jian, Qingchun J. Zhang, Guangyin Lei, Pan Liu

Institution: Fudan University

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406460340

FWCI:

Cites: 40

Cited by:

Related to: 10