Analysis of the Effect on the Dislocation Corrosion Rate and Distribution of 4H-SiC Substrate
Year: 2024
Type: conference-paper
Authors: Jiaxin Zhang, Xiufang Chen, Xianglong Yang, Yan Peng, Xuejian Xie, Xiaobo Hu, Xiangang Xu, Guanglei Zhong
Institution: Shandong University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4406460451