Characterization of Defects in the Expanded Area of Large-Size 8 Inch 4H-Sic Single Crystal Substrates
Year: 2024
Type: conference-paper
Authors: Jiaxin Zhang, Xiufang Chen, Xianglong Yang, Yan Peng, Xuejian Xie, Xiaobo Hu, Xiangang Xu
Institution: Shandong University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4406460636