A Deep Reinforcement Learning Approach to Optimize Closing Down a Single-Arm Cluster Tool
Year: 2024
Type: conference-paper
Authors: WeiXin Liang, QingHua Zhu, ZongRu Li, JianTie Zhou, Yan Hou
Institution: Guangdong University of Technology
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4406611907
