Spline Interpolation-Based Multi-Scale Model for Etching in a Chlorine-Argon Inductively Coupled Plasma
Year: 2024
Type: conference-paper
Source: Winter Simulation Conference
Authors: Lado Filipovic, Tobias Reiter
Institution: TU Wien
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4406612375