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Methods and Results of Electrochemical Investigation of the Relief of Films Deposited by Magnetron Sputtering

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Year: 2024
Type: article
Source: Physics of Atomic Nuclei
DOI: 10.1134/s1063778824130192
Authors: O. I. Obrezkov, Yu. V. Martynenko, M. Yu. Nagel, O. L. Shutev, S. L. Shevchuk, Yu. I. Rukina, V. E. Misnikov, S. N. Kochetov, M. A. Bazhin, D. I. Minaev, A. B. Mishenko, T. V. Churina
Institutions: Kurchatov Institute, National Research Nuclear University MEPhI, Moscow Institute of Physics and Technology, Bakulev Scientific Center for Cardiovascular Surgery Russian Academy of Medical Sciences
Language: English

Topic: Metal and Thin Film Mechanics
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences

Open Access status: closed
OpenAlex ID: W4406740934
FWCI: 0.152
Cites: 14
Cited by: 1
Related to: 10
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