Work

Demonstration of Similarity Laws and Scaling Networks for Radio-Frequency Plasmas

Year: 2025

Type: article

Source: Physical Review Letters

DOI: 10.1103/physrevlett.134.045301

Authors: Dong Yang, John P. Verboncoeur, Yangyang Fu

Institutions: Tsinghua University, Michigan State University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, U.S. Department of Energy, National Natural Science Foundation of China, Tsinghua University

Awards: G5948891258, STUDIES OF KEY MECHANISMS AND CONTROL STRATEGIES FOR PLASMAS IN MICRO/SUB-MICRO SCALES

OpenAlex ID: W4406867965

FWCI: 5.081

Cites: 46

Cited by: 22

Related to: 10