Work

Comparison of Silicon and Silicon-Dioxide Sputtering by a Focused Ion Beam

Year: 2024

Type: article

Source: Semiconductors

DOI: 10.1134/s1063782624700118

Authors: A. V. Rumyantsev, N. I. Borgardt

Institution: National Research University of Electronic Technology

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4406871587

FWCI:

Cites: 25

Cited by:

Related to: 10