Work

In-vacuum dry launching of silica microparticles using an array of custom MEMS devices

Year: 2025

Type: article

Abstract: To test the validity of the quantum superposition principle at unprecedented macroscopic scales, near-field matter-wave interferometry of free-falling massive 100nm silica nanospheres from an optically cooled laser trap has been proposed [ Nat. Commun. 5 , 4788 ( 2014 ) 10.1038/ncomms5788 ]. This could be realized with available technology, providing the emerging technical challenge of in-vacuum dry loading the optical trap with single 100nm silica particles, in a deterministic, repetitive, and clean manner, is addressed. Here, for the first time to our knowledge, we demonstrate, both theoretically and experimentally, a 3×3 array of custom micro-electro-mechanical system (MEMS) storage and release devices for this objective. The fabricated MEMS devices are square ultrasonic flexural silicon membranes, 400 μ m in side length and 8 μ m in thickness, monolithically integrated with a 1 μ m thick aluminium nitride piezoelectric transducer. The ability of the MEMS array to launch 9.98 μ m, 4.23 μ m, and 900nm silica particles in vacuum was tested experimentally using our recently developed GRIN lens-based digital holographic 3D imaging system integrated into a vacuum chamber. The minimum particle size released from the current devices is ∼4 μ m in diameter with the average lateral release speed in the range of 3-35 cm/s. The experimental results obtained are in good agreement with the theoretical predictions.

Source: Optics Express

DOI: 10.1364/oe.547351

Authors: Ali Akbar Khorshad, Ruth Houlihan, Nicholas Devaney

Institutions: University College Cork, Tyndall National Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funders: European Space Agency, Irish Research eLibrary