Work

Study on the Performance of GaN Homoepitaxial Films Grown on Polished Substrates by Different Slurries

Year: 2025

Type: article

Source: ECS Journal of Solid State Science and Technology

DOI: 10.1149/2162-8777/adb17c

Authors: Yan Zhou, Hua Gong, Haimei Luo, Gaopan Chen, Guihai Luo, Liyan Pan, Guoshun Pan

Language: English

Topic: GaN-based semiconductor devices and materials

Subfield: Condensed Matter Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funders: Science, Technology and Innovation Commission of Shenzhen Municipality, Basic and Applied Basic Research Foundation of Guangdong Province

Awards: G692806595, G8773624766

OpenAlex ID: W4407090582

FWCI: 0.646

Cites: 40

Cited by: 2

Related to: 10