A Novel Cantilever-Based Silicon Photonic Accelerometer Using Mach–Zehnder Interferometer Targeting 10-ng/$\sqrt{\text{Hz}}$ Noise Floor
Year: 2025
Type: article
Source: IEEE Sensors Journal
Institution: The University of Texas at Austin
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: U.S. Department of Energy
OpenAlex ID: W4407097704