Work

Extensive adjustment of magnetic field on plasma density and ion incidence angle in radio frequency discharge

Year: 2025

Type: article

Source: Plasma Sources Science and Technology

DOI: 10.1088/1361-6595/adb20d

Authors: Fang-Fang Ma, Quan-Zhi Zhang, Julian Schulze, Yu-Meng Cui, You-Nian Wang

Institutions: Dalian University of Technology, Ruhr University Bochum

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Deutsche Forschungsgemeinschaft, National Natural Science Foundation of China

Awards: G431998119, Elektronenheizung in kapazitiven RF Plasmen basierend auf Momenten der BoltzmannGleichung: Von fundamentalem Verständnis zu wissensbasierter Prozesskontrolle, 面向工业等离子体源的一些关键科学问题的研究

OpenAlex ID: W4407154747

FWCI: 1.386

Cites: 46

Cited by: 6

Related to: 10