Work

Design Analysis and Isotropic Optimization for Miniature Capacitive Force/Torque Sensor

Year: 2025

Type: article

Abstract: A capacitive six-axis force/torque (F/T) sensor has favorable characteristics for miniature design. However, when designing small-sized force/torque sensors, anisotropy among the six axes can lead to uneven sensitivity across each axis. This is due to increased crosstalk errors, which degrade sensor performance. To design a miniature six-axis force/torque sensor, it is essential to analyze the isotropic relationships between the six-axis forces/torques and the capacitance change to reduce crosstalk errors. This paper presents a miniature capacitive six-axis F/T sensor optimized for isotropy. It also establishes a systematic method for designing sensing electrodes. The sensor's deformable structure is analyzed using Castigliano's beam theory, and design parameters are optimized with isotropy analysis of the deformable part. The criteria are also presented, including selecting the electrode area and initial gap using linear equations derived from capacitance change analysis. The optimized miniature F/T sensor is calibrated using a neural network-based calibration method, and its accuracy errors are compared to a reference sensor. The design framework provides a foundation for future developments in miniature sensors.

Source: Sensors

DOI: 10.3390/s25030940

Authors: Seung Yeon Lee, Jae Yoon Sim, Yong Bum Kim, Dongyeop Seok, Jaeyoon Shim, Hyouk Ryeol Choi

Institution: Sungkyunkwan University

Language: English

Topic: Sensor Technology and Measurement Systems

Subfield: Computer Networks and Communications

Field: Computer Science

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $3,137

Funder: Ministry of Trade, Industry and Energy