Inhibitor-Free Area-Selective Deposition of Titanium Nitride
Year: 2025
Type: article
Source: Chemistry of Materials
Authors: Damon B. Farmer, Marinus Hopstaken, Steve Molis, Charles Tabachnick, Peter Kerns, Leonidas Ocola, Noel Arellano, Gerald Gibson
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407206780