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High-Sensitivity Magnetic Field Sensors Manufactured Utilizing CMOS-MEMS Technology

Year: 2025

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2025.3537107

Authors: Zhi-Xuan Dai, Rong-Wei Tsai, Qing-Hua Shih

Institutions: National Chung Hsing University, Taiwan Semiconductor Manufacturing Company (Taiwan)

Language: English

Topic: Magnetic Field Sensors Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science and Technology Council

Award: G7377588832

OpenAlex ID: W4407212630

FWCI: 1.617

Cites: 44

Cited by: 7

Related to: 10