Work

Fabrication of Y-cut LiNbO3 Single Crystalline Film and SAW Resonator on Flexible Polyimide Substrate

Year: 2024

Type: conference-paper

Source: IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)

DOI: 10.1109/icta64028.2024.10860705

Authors: Yizhuo Gao, Wenbo Luo, Shitian Huang, Wei Fan, Dailei Zhu, Xu Wang, Xinqiang Pan, Yao Shuai, Chuangui Wu, Wanli Zhang

Institution: University of Electronic Science and Technology of China

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407214160

FWCI:

Cites: 11

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Related to: 10