Analysis of MEMS Piezoresistive Pressure Sensor with Dual-Island Structures using Circular Silicon Diaphragm
Year: 2024
Type: conference-paper
Authors: Urva Dhoriyani, Radha Debal Goswami, Dadasikandar Kanekal, Sumit Kumar Jindal, Rajat Tiwari
Institution: Vellore Institute of Technology University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407214856