Work

Viability of HFO-1234ze(E) (trans-1,3,3,3-tetrafluoropropene) as a low global warming potential silicon dioxide etch gas

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004194

Authors: Aaron J. Windsor, Jeremy C. Clark, George McMurdy, Eric A. Joseph, Robert G. Syvret, Ronald J. Olson, Judy J. Cha

Institutions: Cornell University, IBM (United States), IBM Research - Thomas J. Watson Research Center

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Responsible consumption and production

Open Access status: closed

Funder: National Science Foundation

Award: NNCI: Cornell NanoScale Science and Technology Facility (CNF)

OpenAlex ID: W4407255055

FWCI: 0.462

Cites: 14

Cited by: 2

Related to: 10