Work

Fabrication of microstructures on porous nanolattices

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004054

Authors: Nayoung Kim, Saurav Mohanty, Vijay Anirudh Premnath, Ethan Flores, Chih-Hao Chang

Institution: The University of Texas at Austin

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Texas Materials Institute

Award: PFI-TT: Advanced Materials for Augmented/Virtual Reality (AR/VR) Applications

OpenAlex ID: W4407265301

FWCI:

Cites: 35

Cited by:

Related to: 10