Year: 2025
Type: conference-paper
Abstract: Focussed beams (electrons, ions, and photons) are at the forefront of today’s and future scientific and engineering advanced research instruments. The beams are typically used for six purposes: imaging, detection, deposition, implantation, milling/ablation, and polishing. There are plethora of detectable and useful signals coming from the beam irradiated matter. One of the signals is electron diffraction and scattering on a crystal planes used by electron backscatter diffraction (EBSD) method. This surface superficial probing technique is sensitive to surface contamination, amorphisation, and lattice distortions, thus requires damage-free sample surface preparation techniques. The advent of coupled multi-beam commercial instruments (DualBeams, CrossBeams and TriBeams) allowed for integration of sample surface preparation techniques, i.e., site specific (cross-sections, serial sections, thin lamellas, micro- and nano-pillars, etc.), and large areas (cross-sections and surface polishing), and beam excited signal detection/quantification methods, i.e., EBSD, EDS, WDS, SIMS, Raman, LIBS, etc. This paper attempts to bring closer the current state-of-the-art of focussed beams systems for use in EBSD technique in Materials Science.
Author: B Winiarski
Institution: Thermo Fisher Scientific (Czechia)
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W4407320295