Modeling and Optimization of MEMS Comb-Type Capacitive Acceleration Sensor
Year: 2024
Type: article
Source: Russian Microelectronics
Authors: Paing Soe Thu, V. V. Kalugin, E. S. Kochurina
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407336776