Work

Gas Phase Composition and Kinetics of Fluorine Atoms in SF6 Plasma

Year: 2024

Type: article

Source: Russian Microelectronics

DOI: 10.1134/s106373972460064x

Authors: A. V. Myakonkikh, V. O. Kuzmenko, A. M. Efremov, K. V. Rudenko

Institutions: Russian Academy of Sciences, Research Institute of Molecular Electronics

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407337184

FWCI: 0.312

Cites: 30

Cited by: 3

Related to: 10