Application of Fuzzy Theory to Parameter Design in Wafer Stealth Laser Dicing
Year: 2024
Type: conference-paper
Authors: Te-Jen Su, Chien-Liang Chiu, Chun-Hsien Su, Mau-Yi Tian, Jui-Chuan Cheng, Shih-Ming Wang
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407360883
