Fringing Effects in a Capacitive Micromachined Ultrasonic Transducer with a SiC Actuation Layer Insulated by High Dielectric Material
Year: 2024
Type: conference-paper
Authors: Sk. Sohel Ahamed, Moumita Pal, Pritam Chakraborty, Biswarup Neogi, Niladri Maity, Reshmi Das
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407467330
