Analysis of Stress and Strain Dynamics in Sub-7nm GAA Si- and SiGe-Channel Nanosheet FETs
Year: 2024
Type: conference-paper
Institutions: Siksha O Anusandhan University, R.V. College of Engineering
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407468779
