Work

Silicon Membranes for Microbolometers: Simulation and Fabrication Using Frontend Bulk Micromachining

Year: 2024

Type: conference-paper

Source: IEEE International Conference of Electron Devices Society Kolkata Chapter (EDKCON)

DOI: 10.1109/edkcon62339.2024.10870751

Authors: Nirupam Paul, Satish Bonam, Siva Rama Krishna Vanjari, Shiv Govind Singh

Institution: Indian Institute of Technology Hyderabad

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Ministry of Electronics and Information technology

OpenAlex ID: W4407468795

FWCI: 1.612

Cites: 13

Cited by: 2

Related to: 10