Work

Enhancing Filtration Efficiency via Nanofibrillation of Polypropylene Fibers for Advanced Slurry Depth Filters in Semiconductor Manufacturing

Year: 2025

Type: article

Source: ECS Journal of Solid State Science and Technology

DOI: 10.1149/2162-8777/adb5bd

Authors: Sanghyun Bae, Gyungbin Ju, Yunseo Jang, Jeongmok Cho, Manhee Lee, Daniel Eumine Suk

Language: English

Topic: Aerosol Filtration and Electrostatic Precipitation

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Trade, Industry and Energy, National Research Foundation of Korea, Ministry of Science and ICT, South Korea, Institute for Information and Communications Technology Promotion

Awards: G214151916, G2708345677, G2880322496, G3374264864, G5999158660, G8331321019

OpenAlex ID: W4407473449

FWCI: 0.225

Cites: 38

Cited by: 1

Related to: 10