Work

Multimodal Scanning Microwave and Electron Microscopy for nanoscale measurements under vacuum

Year: 2024

Type: conference-paper

Abstract: International audience

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Polovodov, Petr, Lenoir, Clément, Boyaval, Christophe, Haddadi, Kamel, Théron, Didier

Institutions: Centre National de la Recherche Scientifique, Université de Lille, Institut d'Electronique, de Microélectronique et de Nanotechnologie, Centrale Lille Institut, Renatech, Institut de Recherche sur les Composants logiciels et matériels pour l'Information et la Communication Avancée

Language: English

Topic: Microwave and Dielectric Measurement Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W4407562970

FWCI:

Cites:

Cited by:

Related to: 10