Work

Deposition of AlGaN thin film using HIPIMS and RF co-sputtering technique

Year: 2024

Type: conference-paper

DOI: 10.1109/iemt61324.2024.10875314

Authors: Nafarizal Nayan, Nur Afiqah Othman, Zulkifli Azman, Riyaz Ahmad Mohamed Ali, Megat Muhammad Ikhsan Megat Hasnan, Mohd Zamri Mohd Yusop, Mohd Yazid Ahmad, Mohd Hafiz Mamat, Ahmad Shuhaimi Abu Bakar

Institutions: Tun Hussein Onn University of Malaysia, Universiti of Malaysia Sabah, University of Technology Malaysia, German-Malaysian Institute, Institut Penyelidikan Keselamatan Jalan Raya Malaysia, Universiti Teknologi MARA System, Universiti Teknologi MARA, University of Malaya

Language: English

Topic: GaN-based semiconductor devices and materials

Subfield: Condensed Matter Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: Universiti Tun Hussein Onn Malaysia

OpenAlex ID: W4407575083

FWCI:

Cites: 9

Cited by:

Related to: 10