Work

Investigating Crystallography and Thickness Distribution of Aluminium Nitride Thin Films Prepared by Magnetron Sputtering on Silicon Wafer

Year: 2024

Type: conference-paper

DOI: 10.1109/iemt61324.2024.10875098

Authors: Zulkifli Azman, Nafarizal Nayan, Muhammad Khairin Shafiq Shaiful Nazri, Ahmad Shuhaimi Abu Bakar, Riyaz Ahmad Mohamed Ali, Faezahana Mohkhter, Norain Sahari, Mohd Rofei Mat Hussin

Institutions: Tun Hussein Onn University of Malaysia, University of Malaya, MIMOS (Malaysia)

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407575098

FWCI:

Cites: 19

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Related to: 10