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Feasibility Study on Real Time Electrostatic Charge Monitoring in Wafer Form Process with Potential Triboelectrification Motion at Dicing Saw

Year: 2024

Type: conference-paper

DOI: 10.1109/iemt61324.2024.10875188

Authors: Jian Liang Lim, Qiu Yin Wong, Mohamad Syafiq Bin Mokhtar, Jayanth Reddy Ramireddy, Mun Seng Wong, Chong How Ng, Kim Chuan Lee, Bh Moon

Institutions: Micron (United States), Micron (Taiwan)

Language: English

Topic: Electrostatic Discharge in Electronics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407575137

FWCI:

Cites: 2

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Related to: 10