Fluorine Residue Reduction in Plasma Dicing
Year: 2024
Type: conference-paper
Authors: Chua Rho Wen, Lau Teck Beng, Taki Fang, Li Shi Zheng, Li Si Yuan, Eu Poh Leng
Institution: NXP (Germany)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407575368