Titanium Dioxide Thin Films Prepared on Different Substrates by Sol–Gel Process: Optical and Morphological Properties
Year: 2025
Type: conference-paper
Abstract: In this study, sol-gel TiO2 thin films were obtained by spin coating on Si, glass and ITO substrates. They were characterized using Field emission scanning electron microscopy (FESEM), Fourier Transform Infrared (FTIR) spectroscopy and Ultraviolet – Visible (UV-VIS) spectroscopy. The impact of the film thickness (different number of layers), annealing temperatures (300, 400 and 500°C) and the type of substrates on the morphology, optical transmittance and vibrational properties were investigated. The work function (WF) of the samples was also determined. TiO2 films on glass substrates revealed a decrease of the film transparency with increasing the film thickness and after annealing at 400 and 500°C. TiO2 films obtained on ITO substrates exhibited very high transmittance in the visible spectral range up to 85%, despite the number of layers and the thermal treatments. FESEM study showed very uniform, smooth surface with small grained structure.
Language: English
Field: Energy
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W4407641478