Work

A high Q factor MEMS accelerometer with quasi-zero effective stiffness

Year: 2025

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/adb75d

Authors: Zhipeng Ma, Leinuo Dong, Ziyi Ye, Yiming Jin, Mingkang Li, Xinyu Qian, Xudong Zheng, Zhonghe Jin

Institution: Zhejiang University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G2813068394

OpenAlex ID: W4407685986

FWCI: 0.452

Cites: 28

Cited by: 2

Related to: 10