Work

Numerical Simulation of Temperature Effects on a Silicon MEMS Resonator for Reliable Temperature Sensing Application

Year: 2024

Type: conference-paper

Source: Global Reliability and Prognostics and Health Management Conference (PHM)

DOI: 10.1109/phm-beijing63284.2024.10874513

Authors: Zhou Fan, Baoqing Nie, Dacheng Xu, Changrong Liu, Heng Yang

Institutions: Soochow University, Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407694045

FWCI:

Cites: 11

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Related to: 10