Comparative study of film quality on c axis oriented AlN deposited by pulsed DC and RF reactive sputtering with optical emission spectroscopy big data analysis
Year: 2025
Type: article
DOI: 10.1116/6.0004001
Institution: National Central University
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Delta Electronics
Award: G968006853
OpenAlex ID: W4407698975