High dynamic magnetic transport system for substrate alignment
Year: 2025
Type: conference-paper
Abstract: Optical waveguides can be manufactured using transfer processes. Therefore, the substrate needs to be transported and precisely aligned between different process steps. To achieve high productivity, a high dynamic transport system is necessary. However, for conventional transport systems, the dynamic positioning accuracy is limited due to friction of the contact-based guides. Thus, a friction-free transport system has the potential to achieve a higher dynamic positioning accuracy. In this paper a novel friction-free transport system with magnetic guide is presented. Its impressive load capacity and high dynamics have been verified through experiments. Based on the experimental data, the transport system is capable of providing loads of up to approximately 2000 N to meet printing requirements and a bandwidth of 75.0 Hz was achieved, which is 125% higher than the contact-based device.
Authors: Berend Denkena, Heinrich Klemme, Jingcai Zhang
Institution: Leibniz University Hannover
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: diamond
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W4407702356
