Work

Dual impact of Nd3+ doping on CeO2 abrasives: enhancing chemical and mechanical effects in chemical–mechanical polishing

Year: 2025

Type: article

Abstract: As the demand for advanced optical glass technology increases, improving polishing slurries to enhance material removal rate and reduce surface roughness has become a priority. Cerium oxide is the most widely used abrasive for glass polishing, and its polishing rate is regarded to increase as the surface Ce3⁺ content rises. To improve this, Nd3+-doped cerium oxide was prepared using a molten salt method. Morphological and X-ray photoelectron spectroscopy (XPS) analyses showed that the Nd3+ doping increased Ce3⁺ content and transformed the particles into an octahedral structure. Additionally, Nd3⁺ doping enhanced the mechanical action, as evidenced by an increased friction coefficient and reduced contact angle. When the doping amount is 4%, Ce3⁺ content and material removal rate peaked at 47.87 nm/min, while the doping amount is 8%, mechanical and chemical synergy achieved the lowest surface roughness of 1.38 nm.

Source: Surface Science and Technology

DOI: 10.1007/s44251-025-00072-x

Authors: Yesheng Zhang, Hong Lei, Jianhua Zhang, Liqiang Luo

Institution: Shanghai University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid:

Funders: National Natural Science Foundation of China, Science and Technology Major Project of Inner Mongolia