Work

Impact of free electron laser coherence on imaging quality

Year: 2025

Type: article

Source: Chinese Physics B

DOI: 10.1088/1674-1056/adb734

Authors: Shuang 爽 Wei 魏, Shuang 爽 Gong 龚, Yang 扬 Bu 步, Zi-Jian 子健 Song 宋

Institutions: Shanghai University, Shanghai Zhangjiang Laboratory, Zhangjiang Laboratory, Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407711432

FWCI: 0.231

Cites: 22

Cited by: 1

Related to: 10