Work

Experimental investigation of the feasibility of in situ plasma cleaning in normal-conducting copper cavities

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004012

Authors: Qianxu Xia, Lianmin Zheng, Yingchao Du

Institution: Tsinghua University

Language: English

Topic: Particle accelerators and beam dynamics

Subfield: Aerospace Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Scientific Instrument and Equipment Development Projects of China

OpenAlex ID: W4407760557

FWCI:

Cites: 25

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Related to: 10