Simulation of MHD-Influence on Silicon Melt Flow in the Czochralski Process
Year: 2024
Type: article
Source: Russian Microelectronics
Authors: N. A. Verezub, A. I. Prostomolotov
Institution: Institute for Problems in Mechanics
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407765195
