Enhancing the nucleation in atomic layer deposition: A study on vanadium sulfide and oxide layers
Year: 2025
Type: article
DOI: 10.1116/6.0004247
Institution: HUN-REN Centre for Energy Research
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1397440426, G68405949
OpenAlex ID: W4407774013