Work

Towards the creation of an inverse electron distribution function in two-chamber inductively coupled plasma discharges

Year: 2025

Type: article

Source: Plasma Science and Technology

DOI: 10.1088/2058-6272/adb895

Authors: Ying 莹 WANG 王, Nie 聂 CHEN 陈, Jingfeng 静锋 YAO 姚, Evgeniy BOGDANOV, Anatoly KUDRYAVTSEV, Chengxun 承勋 YUAN 袁, Zhongxiang 忠祥 ZHOU 周

Institutions: St Petersburg University, Harbin Institute of Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G3933638345, G4488574923, G4668059947

OpenAlex ID: W4407778941

FWCI: 0.453

Cites: 25

Cited by: 2

Related to: 10