Novel PAG bound polymers for high resolution EUV applications
Year: 2025
Type: conference-abstract
DOI: 10.1117/12.3050504
Authors: Yongqiang Zhang, Qiu Dai, Michael T. Sheehan
Institution: DuPont (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407832928