Work

An out-of-focus blur removal technique for high-throughput overlay measurement

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051171

Authors: Kazushiro Takasugi, Jun Chen, Kazunori Hanawa, Hideaki Sasazawa, Yasutaka Toyoda

Institution: Hitachi High-Tech (Japan)

Language: English

Topic: Image Processing Techniques and Applications

Subfield: Media Technology

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407833227

FWCI:

Cites: 1

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Related to: 10