Work

Reference-less defect inspection method based on unsupervised deep learning for semiconductors

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3046183

Authors: Takehiro Maeda, Minoru Harada, Hajime Kawano

Institutions: Hitachi (Japan), Hitachi High-Tech (Japan)

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407833230

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Cites: 8

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Related to: 10