High-performing virtual metrology with group-wise feature transformation and advanced data aggregation techniques
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051265
Authors: Guntitat Sawadwuthikul, Jiae Kim, Sol Kwon, Wonsang Chang, Pil Sung Jo
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407833265
