A study of CD-SAXS within-spot uniformity with mass CDSEM and 3D tomography
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3048889
Authors: Yuseong Jang, Dongjin Choi, Jeong Keun Song, Sujung Lee, Taeseok Seong, Hyungjin Lee, Sangwon Seo, Chulgi Song, Tian Lan, Jin Zhang, Sean Ningen, Tiffany Teoh, David Pirkle, Matt Davis
Institution: Lam Research (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407833423