Work

Multi-electron beam inspection application in memory fab

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3056182

Authors: Rajesh Kamana, Wendi Zhang, Yuxuan Liu, Yujie Chen, Anson Tseng, Greg Tsai, Freya Wen, Wade Hsu, Elaine Chen, Jared Yu, Henry Yu, Kolos Lin, Tony Chiu

Institutions: Micron (United States), ASML (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407833504

FWCI:

Cites: 12

Cited by:

Related to: 10